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Dichlorosilane (DCS) (SiH2Cl2)

Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H2SiCl2. In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS·NH3 (i.e. 16:1), usually results in lower stress nitride films

Products in category: Dichlorosilane (DCS) (SiH2Cl2)

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  • GTD-2000Tx IECEx Gas Detector Dichlorosilane (DCS) (SiH2Cl2) 0-15 ppm

    Continuous detection of toxic gases and oxygen in explosion hazardous area with flame proof structure Self diagnosis function with built-in Microprocessor Excellent selectivity by adapting detection principle only for toxic gases & oxygen Superior performance for detecting toxic gases below TLV Multi functions and high quality with low cost of ownership Built-in back light LCD…

  • GTD-3000Tx IECEx Gas Detector Dichlorosilane (DCS) (SiH2Cl2) 0-15 ppm

    Continuous detection of toxic gases and oxygen in explosion hazardous area with flame proof structure Self diagnosis function with built-in Microprocessor Excellent selectivity by adapting detection principle only for toxic gases & oxygen Stable quality and proved detection principle for service life | Built-in back light LCD or OLED display Auto calibration and program setting…

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